Plasma cleaning and activation

Plasma cleaning and activation

Description

The Plasma clean tool Diener Tetra 30 RF performs surface plasma cleaning and surface activation.

Capacities

  • RF generator
  • 3 process gases (oxygen, argon, nitrogen)
  • Tank volume of 34 L.

Applications

The tool performs a surface plasma clean to facilitate wire bonding, flip chip assembly, etc. It can modify the surface, such as changing wettability: hydrophilic, hydrophobic.

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Last update on July 20, 2015