Profilometer

Profilometer

Description

The stylus profilometer Bruker, model DektakXT, is a measuring system to measure a two-dimensional surface's profile, it is used to measure film thickness and to quantify surface’s roughness.

Capacities

  • PC based profilometer equipped with Bruker operation and analysis software
  • Vertical measurement range: 1 mm
  • Vertical resolution: 1 Angström
  • Step height repeatability: 4 Angström, 1 sigma on steps less or equal to 1 μm (30 scans using a 12.5 μm stylus)
  • Stylus radius options: from 50 nm to 25 μm (2 μm and 12.5 μm are available in house)
  • Stylus force: from 1 to 15 mg
  • X-Y stage: 100 mm x 100 mm
  • Scan length range: from 50 μm to 55 mm
  • Data Points per scan: up to 120,000
  • Maximum sample thickness: 50 mm
  • External cover provides acoustic and ESD protection.

Applications

  • Film thickness measurements
  • Surface’s roughness analyses
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Last update on December 29, 2015